Fabrication of High-Resolution Fast-Response Semiconductor Radiation Detectors
The current X-ray imaging technology utilized in the medical industry is
based on X-ray films. It requires a rather long patient exposure-time to
X-ray and demands a long processing time to develop the X-ray films.
Moreover, except for the location where the X-ray is taken, the X-ray films
are not readily accessible to other medical professionals in case of an
emergency far away from the primary care providers. These problems can be
solved by utilizing semiconductor based X-ray detectors. The difference
between using semiconductor detectors and conventional X-ray films is
similar to the difference between utilizing a CCD camera and a normal film
camera. In the latter, there is a need to develop the film and the exposure
time is longer compared to CCD cameras. However, CCD cameras are not
suitable for X-ray measurements due to the need to focus the X-ray beam
which requires expensive and difficult optics. Progress in developing X-ray
detectors has been rather slow. One of the major reasons for the lack of
such development is the difficulty associated with the preparation and
optimization of materials needed for the fabrication of these devices. The
circuitry needed for control, communication and data management of these
devices is readily available from other technologies such as charge coupled
devices (CCD), spectroscopic analyzers, and imaging software and hardware.
The materials required for X-ray detection and imaging devices are called
wide bandgap semiconductors. Among this class of semiconductors are gallium
nitride (GaN), indium nitride (InN), aluminum nitride (AlN), and silicon
carbide (SiC). These semiconductors possess optoelectronic properties that
make them nearly ideal radiation detectors with fast charge collection (fast
response, low X-ray exposure), low leakage current (low noise) even at high
temperatures, and they do not require a p-n junction for low noise operation
of the detectors (low-cost, simple fabrication process). In addition, these
materials are highly stable, chemically inert, and tolerant of harsh
environments which makes them suitable for implantable devices. Moreover,
these properties are ideal for uncooled detectors for X-ray spectroscopy
which is finding increasing use in medical diagnostics. Due to the fast
response of these devices, they can be accessed by computers for immediate
analysis, storage, and motion video imaging.
This project focuses on the development of SiC radiation detectors. Our
goal is to develop the technology needed for the fabrication of low-cost,
miniature, highly sensitive radiation detectors for X-ray and higher energy
radiation that can replace X-ray films and expensive CCD devices currently
used in medical diagnostics.